Measurement Technology for Micro-Nanometer Devices

Jingdong Chen

A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale • Highlights the advanced research work from industry and academia in micro-nano devices test technology • Written at both introductory and advanced levels, provides the fundamentals and theories • Focuses on the measurement techniques for characterizing MEMS/NEMS devices

Категория: электроника

ISBN: 9781118717981

Правообладатель: John Wiley & Sons Limited

Легальная стоимость: 15153.01 руб.

Ограничение по возрасту: 0+