Measurement Technology for Micro-Nanometer Devices

3.55 из 5, отдано 20 голосов

A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale • Highlights the advanced research work from industry and academia in micro-nano devices test technology • Written at both introductory and advanced levels, provides the fundamentals and theories • Focuses on the measurement techniques for characterizing MEMS/NEMS devices

Категория: электроника

ISBN: 9781118717981

Правообладатель: John Wiley & Sons Limited

Легальная стоимость: 16283.51 руб.

Ограничение по возрасту: 0+

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