Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.
Категория: техническая литература
ISBN: 9781118621233
Правообладатель: John Wiley & Sons Limited
Легальная стоимость: 20966.37 руб.
Ограничение по возрасту: 0+
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