Silicon Technologies. Ion Implantation and Thermal Treatment

Annie Baudrant

The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.

Категория: техническая литература

ISBN: 9781118601112

Правообладатель: John Wiley & Sons Limited

Легальная стоимость: 20277.91 руб.

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